United States Patent 10,656,338 Lam May 19, 2020
Post# of 1140
Lam May 19, 2020
Wafer-level optoelectronic packaging
Abstract
A wafer-level optoelectronic packaging method includes fabricating a pre-singulated wafer. The pre-singulated wafer has a plurality of sub-mounts. A first sub-mount of the plurality of sub-mounts includes an optical waveguide formed on a substrate, a multi-layered sub-mount boundary wall that is formed on the optical waveguide, and a v-groove that is external to the sub-mount boundary wall. A plurality of optical dies are attached to the corresponding plurality of sub-mounts, such that each optical die is aligned to the optical waveguide of the corresponding sub-mount. A cap-wafer including a plurality of caps is attached to the pre-singulated wafer to obtain an encapsulated pre-singulated wafer. The encapsulated pre-singulated wafer is diced to obtain a plurality of optoelectronic packages. The optical waveguide of each optoelectronic package serves as an interconnection conduit between the corresponding optical die and an optical fiber placed in the corresponding v-groove.
Inventors: Lam; Yee Loy (Singapore, SG)
Applicant:
Name City State Country Type
POET TECHNOLOGIES, INC.
San Jose
CA
US
Assignee: POET Technologies, Inc. (San Jose, CA)
Family ID: 1000004803508
Appl. No.: 15/802,009
Filed: November 2, 2017
http://patft.uspto.gov/netacgi/nph-Parser?Sec...ologies%22