Introducing the Low-Profile A-361 Nanopositioning Stage

Overview of the A-361 Nanopositioning Stage

Introducing the A-361, a cutting-edge air-bearing XY-rotation stage developed by PI (Physik Instrumente). This innovative single-module platform is designed to deliver exceptional precision and reliability in various demanding applications across research and industry.

Compact Design and Specifications

The A-361 stage stands out with its remarkable low profile of only 39.5mm tall and a substantial 200mm diameter motion platform, optimizing workspace in tight environments. It offers a translational motion of 5mm in both the X and Y axes, paired with a rotational motion around the Z axis measuring 2°.

High Precision and Performance

Equipped with outstanding performance specifications, the A-361 is suitable for the most rigorous environments. It features a minimum incremental motion of less than 30nm for linear movements and sub-0.5µrad for rotation. The calibrated positioning accuracy impressively reaches ±0.2µm in XY and ±5µrad in ?Z. Additionally, the bidirectional repeatability achieves a remarkable 0.2µm in XY and 4µrad rotationally.

Applications in Various Sectors

A versatile tool, the A-361 PIglide XY-theta stage excels in several applications, including wafer inspection, flat-panel display metrology, fiber and optics alignment, maskless lithography, and µLED manufacturing. Its clean design and impressive stability make it an ideal choice for semiconductor and photonics production environments.

Technological Innovations

A remarkable aspect of the A-361 is its frictionless bearing design combined with a lock-down mechanism, providing ultra-high stability. The integration of air bearings and non-contact motors prevents wear, allowing for a maintenance-free operation that can last decades. The position-locking feature further enhances stability, especially in critical measurement and alignment tasks, while a built-in vacuum chuck is perfect for handling delicate substrates in the semiconductor and optics markets.

Direct Drive Mechanism

The A-361 employs voice-coil direct drives, delivering frictionless and responsive motion capabilities. With the ability to generate up to 6N of continuous force and a peak of 19.2N, it can support payloads reaching 3kg, all while maintaining a lightweight construction using hard-anodized aluminum for added durability and stability.

Integration and Operation

Designed specifically for cleanroom conditions, the A-361 requires only dry, oil-free compressed air that adheres to ISO 8573-1 purity standards. Its air consumption is an efficient 28L/min, promoting effective continuous operation. When combined with the A-523 Z Tip/Tilt Stage, it creates a robust array for six-degree-of-freedom nanopositioning, providing complete spatial control for high-precision alignment tasks in photonics, optics, and micro-assembly. PI also offers a range of integrated accessories such as air-preparation kits, multi-axis controllers, and custom cabling solutions for seamless system integration and enhanced performance.

Industries Benefiting from the A-361

The A-361 nanopositioning stage finds applications across various industries, including semiconductor testing and wafer inspection, photonics and fiber alignment, precision optics alignment, flat panel inspection, maskless lithography, advanced LED manufacturing, tribology, and material research.

Contacting PI Americas

For more about the A-361 Low Profile XY-Rotation Air-Bearing Nanopositioning Stage and its capabilities, please visit PI Americas. They remain eager to assist potential clients in exploring these remarkable technological advancements.

Frequently Asked Questions

What is the height of the A-361 stage?

The A-361 stage is notably compact, with a height of just 39.5mm.

What types of applications is the A-361 used for?

The A-361 is ideal for wafer inspection, fiber and optics alignment, maskless lithography, and various precision manufacturing processes.

How does the A-361 ensure precision?

The A-361 stage features precision motion capabilities with less than 30nm incremental motion for linear axes, ensuring high accuracy for demanding tasks.

Can the A-361 handle heavy payloads?

Yes, despite its compact size, the A-361 can support payloads of up to 3kg while maintaining stability and performance.

What sort of maintenance does the A-361 require?

Thanks to its frictionless design, the A-361 requires minimal maintenance, promoting a lifespan measured in decades with proper dry air supply.

About The Author

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