Advanced Vacuum Inlet Traps for ALD Processes
Mass-Vac, Inc. has unveiled a comprehensive line of vacuum inlet traps specifically designed for Atomic Layer Deposition (ALD) applications. These innovative traps cater to a diverse range of needs, from research settings to extensive production environments. They represent a significant advancement for professionals in the semiconductor and thin film deposition industries who require precision and reliability.
Key Features of Mass-Vac Vacuum Inlet Traps
The Mass-Vac Vacuum Inlet Traps boast all stainless steel construction, ensuring exceptional durability and performance. Available in sizes from 4 inches to 16 inches in diameter, they feature interchangeable filter elements. This adaptability allows users to customize their traps according to their specific operational requirements, effectively removing all process byproducts from precursors including TMA, TiCl, DeZ, and H2S, along with particulates and unreacted materials.
Versatile Filter Elements
Users can benefit from a variety of filter options with Mass-Vac Vacuum Inlet Traps. These include stainless steel gauze designed to capture particles, activated charcoal for unreacted precursor adsorption, and specific materials for neutralizing harmful substances: Sodasorb for acids, Sulfatreat for H2S, and Ammoniasorb for ammonia and amines. Such versatility allows technicians to tailor their filtration systems to accommodate a wide range of chemical processes inherent in ALD technology.
Price and Customization Options
The pricing for Mass-Vac Vacuum Inlet Traps for ALD processes ranges from $390 to $5,750, depending on the configuration selected. Prospective users are encouraged to request specific price quotations tailored to their individual needs and operational settings. This flexibility not only makes them accessible but also positions them as valuable assets for both small labs and large-scale production facilities.
Contact Information for Inquiries
For further information regarding the Mass-Vac product line and to discuss customized solutions, interested parties are invited to reach out to Mass-Vac, Inc. directly. David Rolph from Marketing stands ready to assist at their Billerica office. The company can be contacted via telephone or their website for the latest updates and offerings, ensuring all inquiries are addressed promptly.
Frequently Asked Questions
What are the primary applications for Mass-Vac Vacuum Inlet Traps?
These traps are used mainly in Atomic Layer Deposition processes, both in research and production environments.
How do the filter elements work in the traps?
The filter elements effectively capture and neutralize various chemical byproducts, ensuring cleaner and more efficient ALD processes.
What is the price range for these vacuum inlet traps?
Prices range from $390 to $5,750, depending on the selected configuration and features.
Can users customize their vacuum inlet traps?
Yes, users can tailor the traps with interchangeable filter elements to meet their specific needs.
How can I get in touch with Mass-Vac for more information?
Contact Mass-Vac directly via phone or through their website to inquire about their products and services.
