Beneq's Transform Tool Paves Way for GaN Device Advancements

Beneq's Transform Tool Achieves Major Qualification Milestone

Beneq is making significant strides in the field of GaN device manufacturing with the recent qualification of its Transform ALD cluster tool. This achievement marks an important step forward as Beneq collaborates with a leading Asian semiconductor manufacturer to enhance production capabilities of GaN-based power devices using 8-inch GaN-on-Si wafers.

Impact on GaN Power Electronics

Gallium nitride (GaN) semiconductors play a crucial role in improving efficiency and performance across a wide array of power electronics and RF devices, ranging from consumer products to automotive applications and datacenters. By qualifying its Transform platform, Beneq demonstrates its unwavering commitment to meeting the stringent demands for performance and reliability that commercial production requires.

Understanding the Transform ALD Tool

The Beneq Transform tool is designed to execute a proprietary three-step process that includes plasma-based surface pre-cleaning, plasma-enhanced atomic layer deposition (PEALD) of interfacial layers, and thermal ALD of dielectric films. This innovative architecture operates under continuous vacuum, ensuring superior quality in interface engineering and consistent process reliability. This is particularly vital for handling wide-bandgap materials such as GaN and silicon carbide (SiC).

Versatile Applications and Capabilities

In addition to enabling the deposition of essential dielectric films like Al?O?, AlN, SiO?, and HfO?, the Transform tool also supports nitride film deposition such as AlN and SiN. This flexibility caters to a diverse range of applications across GaN high electron mobility transistors (HEMTs), integrated circuits (ICs), and vertical devices, empowering manufacturers to address various market needs efficiently.

Transform's Global Presence

The design of the vacuum-integrated cluster tool focuses on high throughput and offers best-in-class cost-of-ownership, all while supporting demanding process requirements. Currently, a total of seventeen Beneq Transform tools are actively leveraged for GaN device production and technological development across the globe.

Voices from Beneq Leadership

Pasi Meriläinen, Vice President of Semiconductor ALD at Beneq, reflected on this achievement by stating, "Qualification by a Tier 1 GaN power device manufacturer underscores the strength of our Transform platform and its leading role in GaN manufacturing. We remain committed to enabling our customers' production goals through robust, application-driven ALD solutions." This underscores Beneq's focus on client needs and quality-driven approaches.

Collaborations to Enhance GaN Technologies

Beneq continues to spearhead advancements in GaN processing capabilities through partnerships, notably with imec as a member of its Industrial Affiliation Program (IIAP). Recently, a Transform tool was commissioned at imec, further expanding joint R&D initiatives in GaN surface treatments and dielectric integration, which began two years ago. This collaboration is expected to yield innovative solutions tailored to the growing demands of the industry.

Frequently Asked Questions

What is the significance of the Beneq Transform tool qualification?

The qualification signifies Beneq's ability to meet the rigorous performance and reliability standards required for volume production of GaN-based power devices in the semiconductor industry.

How does the Transform tool enhance GaN manufacturing?

The Transform tool utilizes advanced processes like plasma-based cleaning and ALD, ensuring high-quality interface engineering crucial for the effective use of GaN materials.

What kind of applications can utilize Beneq's Transform tool?

The tool is versatile and can be used in various applications, including GaN HEMTs, ICs, and different vertical devices, across markets such as consumer electronics and automotive.

How many Transform tools are currently operational?

There are currently seventeen Beneq Transform tools in operation globally, being utilized for GaN device production and advanced technology development.

What future developments can we expect from Beneq?

Beneq is actively pursuing further advancements in GaN processing technologies, especially through collaborations with research entities, enhancing their offerings for future market needs.

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