ACM Research's Innovative High-Temperature Tool Qualified
FREMONT, Calif. — ACM Research, Inc. (NASDAQ: ACMR), a leading provider of wafer processing solutions for advanced packaging and semiconductor applications, has some exciting news. Their Single-Wafer High-Temperature Sulfuric Peroxide Mixture (SPM) tool has received qualification from a prominent logic device manufacturer in China. This success marks a significant milestone as ACM has successfully delivered its SPM tools to a total of thirteen customers to date.
Details of the New High-Temperature SPM Tool
The newly qualified tool incorporates ACM’s proprietary nozzle design, which effectively minimizes acid mist splatter during the SPM process. This improvement not only bolsters particle performance but also reduces the need for frequent maintenance cleaning, thus enhancing system uptime. The tool is designed to support both wet etching and wafer cleaning needed for front- and back-end processes down to 28-nanometer technology nodes and below.
Commitment to Innovation
Dr. David Wang, ACM’s President and Chief Executive Officer, noted that the introduction of the Single-Wafer Moderate/High-Temperature SPM tool exemplifies ACM’s dedication to innovating solutions tailored for high-volume 300mm semiconductor manufacturing. Attention from the global customer base has already indicated a strong interest in this tool, which plays a pivotal role in the manufacturing of next-generation semiconductor devices.
Advanced Features for Enhanced Performance
This modern SPM tool caters to various cleaning and wet etching processes. It can operate at low-to-medium temperature sulfuric acid cleaning at 90°C, high-temperature sulfuric acid photoresist stripping at 170°C, and ultra-high temperature sulfuric acid metal lift-off at 190°C. As semiconductor nodes continue to advance, the demand for efficient single-wafer high-temperature processing is on the rise, presenting stringent requirements for particle control and chamber management.
In response to these challenges, ACM has incorporated innovative features into its Single-Wafer Moderate/High-Temperature SPM tool:
- A multi-level heating method ensuring that the maximum mixed temperature exceeds 230°C with precise control.
- An advanced SPM nozzle design that prevents splashing outside the chamber while achieving a remarkable average particle count of fewer than 10 at 26nm.
This tool is equipped with an inline chemical mixing system and a flexible process chamber capable of accommodating various chemical solutions. Moreover, it can be seamlessly integrated with ACM's patented SAPS and TEBO megasonic technologies to improve the removal of organic contaminants and better prepare wafer surfaces.
ACM Research: Committed to Excellence
ACM Research is recognized for its breadth of semiconductor process equipment, covering essential areas like cleaning, electroplating, and packaging tools. The Single-Wafer Moderate/High-Temperature SPM tool is designed not only for effective organic defect removal but also for minimizing film loss. Supporting wafer sizes ranging from 150mm to 300mm, this system features multiple load ports and a customizable setup of chambers, further enhancing its versatility.
With its commitment to high-performance and cost-effective process solutions, ACM is helping semiconductor manufacturers improve productivity and yield. For specific inquiries, the following company contacts are available:
Company Contacts
USA:
Alyssa Lundeen
Kiterocket
+1 218.398.0776
alundeen@kiterocket.com
China:
Xi Wang
ACM Research (Shanghai), Inc.
+86 21 50808868
Korea:
David Kim
ACM Research (Korea), Inc.
+82 1041415171
Taiwan:
David Chang
+886 921999884
Singapore:
Adrian Ong
+65 8813-1107
Frequently Asked Questions
What is ACM Research known for?
ACM Research is a leading provider of wafer processing solutions for the semiconductor industry.
What features does the new SPM tool have?
The tool includes a multi-level heating method, advanced nozzle design to minimize acid splatter, and supports a range of cleaning processes.
Who has qualified the new SPM tool?
A prominent logic device manufacturer in China has qualified the tool, reflecting its reliability and efficiency.
What is the target market for ACM's new product?
The new tool primarily targets the high-volume 300mm semiconductor manufacturing market.
How can I get in touch with ACM Research?
You can contact ACM via their listed representatives across various countries, including the USA, China, Korea, Taiwan, and Singapore.
